Qualification of any automated inspection process is a time-consuming process. With the Prime Results AIME system in place, the qualification builds on many other components of the system and can streamline the process.
Automated Data Entry Sheet
Prime Results has designed our services with tools to minimize data entry errors throughout the process.
AIME qualification procedure
In a typical inspection process, the physical defect set is reloaded each time a revised recipe is analyzed. This produces different images, which could produce different results even if no changes are make in the inspection recipe. With the AIME system in place, the qualification module saves images during the initial qualification. Reprocessing the saved images with a revised recipe shows the true impact of recipe modification without requiring line time for testing.